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Build Your Online Product Catalogs?
| Product Name: |
CVD System
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| Supply Ability: |
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| Related proudcts |
cvd system, |
| Specifications |
BTF-1200C-CVD |
| Price Term: |
EXW |
| Port of loading: |
HEFEI |
| Minimum Order |
1 |
| Unit Price: |
10800 |
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CVD System consists of tube furnace,gas supply system and vacuum unit.
Split vacuum tube furnace
BTF-1200C BTF-1200c can supply vacuum&atmosphere protection environment .
It is easy to installation and di***tch.From the tran***rent quartz chamber,the state of sintering can be observed.
Pneumatic spring structure make the operator easy to open it.
Tube size ¦µ50 ¡Á1000mm£¨tube size can be optional)
Heating element Fe-Cr-Alloy adopted by Mo
Zone length Heating :440mm Constant:200mm
Temperature controller *30 programmable segments for precise control of heating rate ,cooling rate and dwell time.
*Built in PID automatic tune function with overheating&brocken thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants.
Accuracy ¡À1℃
Suggest heating rate 15℃/min
Standard accessories quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block1 pc.
Gas-supply system 3 channels MFC,GMF-3Z
Connector style Double cutting ferrule stainless steel connector
Standard range(N2) 50sccm¡¢100sccm¡¢200sccm(optional)
Accuracy ¡À1.5%FS
Linearity ¡À0.5¡«1.5%
Working pressure range 0.1¡«0.5 ***
Max.pressure 3***
Connector ¦µ6,1/4''
Display LCD touch screen 3 figrues show
Working tem. environment 5~45 High purity gas
Pressure vacuum gauge -0.1~0.15 ***£¨0.01 ***/grid£©
Inter&exter Parabolic ss pipe ¦µ6
Low vacuum unit£¬Vau-02
Relative air humidity ¡Ü85%
Working voltage 220V¡À10% 50~60HZ
Air bleed rate 8m3/h
Experiment vacuum 1.0X10-1Pa
Oil capacity 1.1L
Inlet/Outlet caliber KF25
Rotation rate 1450rpm
Noise 50dB
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| Company: |
Anhui BEQ Equipment Technology Co.Ltd.
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| Contact: |
Ms. Elaine beq |
| Address: |
Huashan Industrial Park |
| Postcode: |
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| Tel: |
86055165148213 |
| Fax: |
86055165148213 |
| E-mail: |
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